Problems with your turbomolecular vacuum pump or molecular drag vacuum pump?

In the semiconductor industry, there are two vacuum pumps in particular that are excellent for producing clean, truly oil-free vacuums. They are the turbomolecular vacuum pump and the molecular drag vacuum pump.

In the basic composition of a turbomolecular vacuum pump, angled blades spin rapidly forcing gas molecules through an outtake valve thus creating a vacuum. This is a high vacuum pump where full operating speeds can be reached in minutes, meaning an additional roughing pump is unnecessary. An advantage to the turbomolecular pump is that is does not permit the backstream of any oil vapors, signifying that the resulting vacuum is contaminate-free. Manufacturers like Seiko Seiki, have produced turbo pumps for use on tools to evacuate process chambers in semiconductor etch, HDP-CVD and ion implant applications. With minimal noise and vibration, no bearing wear, and low cost of ownership the turbo pump is an ideal choice for vacuum solutions.

Conversely, the molecular drag vacuum pump is also a low vacuum pump. It operates with both a single-stage impeller and a high-speed rotor, which spin between two inner and outer cylindrical walls. As the velocity increases, gas molecules are pushed out of the exhaust valve. The molecular drag vacuum pump can be mounted in any orientation and is perfect for applications requiring clean, low-pump speeds.

Regardless of whether your company uses the turbomolecular vacuum pump like the Seiko Seiki vacuum pump, the Pfeiffer/Balzers vacuum pump, the Varian vacuum pump, or another brand of molecular drag vacuum pump, you will need the maintenance and repair help of a qualified company. That is where FMG comes in. Since 1985, we have specialized in the repair of vacuum pumps and blowers. Our technicians are professionals, and no matter what brand of pump you are using, we have the expertise to repair it and see that it is operating a maximum capacity.

To receive more information about FMG and our experience with the various pumps used in the semiconductor industry, please contact one of our representatives today at fmg_sales@fmgvacpump.com . We look forward to answering any questions you may have.