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FMG-DRY Vacuum Pumps

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FMG-DRY™ Pump

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FMG-DRY Pump Models

FD & FDE Series

Pump L/min (CFM)
FD-120 1336/2000 (80/120)
FD-300 4665/5539 (270/330)
FD-400 5419/6666 (309/400)
FDE-120 1336/2000 (80/120)
FDE-300 4665/5539 (270/330)
FDE-400 5419/6666 (309/400)
FDE-650 900/1080 (542/650)
FDE-800 11100/13330 (660/800)

PDF Series

Pump L/min (CFM)
PDF-110 1880 (65)

FS Series

Pump L/min (CFM)
FS-80 1300/1600 (80/96)
FS-160 2150/2600 (130/156)
FS-180 2500/3000 (150/180)
FS-302 4167/5000 (144/177)
FS-602 8300/10000 (500/600)
FS-902 12500/15000 (750/900)
FS-1302 17500/2100 (1050/1260)
FS-1802 25000/30000 (1500/1800)

FSE Series

Pump L/min (CFM)
FSE-80 1300/1600 (80/96)
FSE-160 2150/2600 (130/156)
FSE-180 2500/3000 (150/180)
FSE-602 8300/10000 (500/600)
FSE-902 12500/15000 (750/900)
FSE-1302 17500/2100 (1050/1260)
FSE-1802 25000/30000 (1500/1800)

Screw Assembly


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Printable Version - PDF

FMG-DRY

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FMG is proud to be the global leader in the latest dry screw technology

Ceramic coatings are the latest in dry vacuum pump screw technology, replacing Nickel and Teflon. FMG-DRY Ceramic coated rotors use Silicon Carbide material and are virtually non-stick. Additional innovation and change, means cleaning our ceramic screws is simple with our "Auto Clean Function". Together these technologies are major breakthroughs in dry pump performance.

Why FMG-DRY?

With years of experience in the vacuum industry FMG recognizes great vacuum pumps. At FMG we are dedicated to maintaining our reputation for excellence. Our factory trained and certified personnel insure you the highest quality product and service on every FMG-DRY pump we sell.

Competitive Attributes

  • FMG's 'Lotus Effect' delivers improved uptime and better cost of ownership
  • No Elastomer oil seals; no Teflon seals; no oil leaks
  • Quality shaft seal 'piston ring' design, no leakage, no bearing issues
  • Hi-Tech Ceramics using silicon carbide protect the rotors and casing in corrosive and harsh processes
  • Quality, proven electro-mechanical construction giving sustainable performance when you need it. Backed by essential electronics, for online production management

FMG can further design and build your FMG-DRY vacuum pump to meet your personalized specifications. You can choose to add covers, controllers, and a heater for example. Build what you want, with the rotor coating you require for your perfect set up, from a proven reliable dry vacuum pump, from a proven reliable supplier.


FMG-DRY FD/FDE Series

The product feature of screw rotor type vacuum pump PD/PDE series.

Dry screw vacuum pump, can be with water-cooled motor (explosion-proof) or air-cooled motor (explosion), high pumping speed in high pressure, low power consumption, low noise.

Application Field: TFT-LCD, Touch Panel, Solar, Metallurgical System, Coating, Plasma processes, Drying Process, Degassing, Biotech/Pharmaceutical, Chemical Industry

Model FD/FDE-120

1336/2000 liters/min (80/120 CFM)
Model FD-120
Dimensions (LxWxH):
Model FDE-120
Dimensions (LxWxH):
Ultimate Pressure:

Model FD/FDE-300

4665/5539 liters/min (270/330 CFM)
Model FD-300
220/380/440V, 50/60 Hz
Dimensions (LxWxH):
1265mm x 430mm x 650mm
Model FDE-300
220/380/440V, 50/60 Hz
Dimensions (LxWxH):
1320mm x 534mm x 784mm
Ultimate Pressure:
≤ 5 (3.7x10-2) Pa(Torr)

Model FD/FDE-400

5419/6666 liters/min (309/400 CFM)
Model FDE-400
220/380/440V, 50/60 Hz
Dimensions (LxWxH):
1582mm x 700mm x 767mm
Model FDE-400
220/380/440V, 50/60 Hz
Dimensions (LxWxH):
1927mm x 700mm x 767mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

Model FDE-650

900/1080 liters/min (542/650 CFM)
Model FDE-650
900/1080 liters/min (542/650 CFM)
Dimensions (LxWxH):
Ultimate Pressure:

Model FDE-800

11100/13330 liters/min (660/800 CFM)
Model FDE-800
220/380/440V, 50/60 Hz
Dimensions (LxWxH):
1831mm x 610mm x 735mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

> Request Pricing & Information


FMG-DRY PDF Series

Lowest Power consumption.

Idle saving mode, only 0.08 kW in power consumption.

Small size, light weight and easy installation, Saving space for installation site.

Best choice for the semiconductor light processes.

Application Field: TFT-LCD, Touch Panel, Solar, Metallurgical System, Coating, Plasma processes, Drying Process, Degassing

Model PDF-110

1880 liters/min (65 CFM)
Model PDF-110
220/380V, 3 HP
Dimensions (LxWxH):
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

> Request Pricing & Information


FMG-DRY FS Series

The product feature of screw rotor type vacuum pump FS series.
Use Central control and Monitoring System to prevent Vacuum Pump shutdown abnormally.
Inverter and Humanity operation interface
Integrate N2 heating system resists corrosion and deposition, and makes pump high performance and longer life time.

FS Series Application Field: Vacuum Coating, Vacuum Oven, Thermal Process, Pharmaceutical, Chemical, Semiconductor, TFT/LCD, LED and Solar Cell, etc.

FMG-DRY FSE Series

The product feature of screw rotor type vacuum pump FSE series.
All series with Microprocessor Controller for easy operating, monitoring and protecting pumps.
For special processes, we can provide special coating solution, to have great performance on pump protection.
We have the optional inverters to shorten process time and save energy.
No cooling water is needed for our Full Air-cooled Pump type.
Explosion-proof parts can be customized for specific requirements.

FSE Series Application Field: Vacuum Coating, Vacuum Oven, Thermal Process, Pharmaceutical, Chemical, etc.

Model FS/FSE-80

1300/1600 liters/min (80/96 CFM)
Model FS-80
220~440V, 50/60 Hz, 2.98 kW
Dimensions (LxWxH):
814mm x 380mm x 663mm
Model FSE-80
220~380V, 50/60 Hz, 3.75 kW
Dimensions (LxWxH):
81295mm x 497mm x 571mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

Model FS/FSE-160

2150/2600 liters/min (130/156 CFM)
Model FS-160
220~440V, 50/60 Hz, 4.47 kW
Dimensions (LxWxH):
895mm x 410mm x 678mm
Model FSE-160
220~380V, 50/60 Hz, 5.6 kW
Dimensions (LxWxH):
1295mm x 497mm x 586mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

Model FS/FSE-180

2500/3000 liters/min (150/180 CFM)
Model FS-180
220~440V, 50/60 Hz, 4.47 kW
Dimensions (LxWxH):
920mm x 430mm x 650mm
Model FSE-180
220~380V, 50/60 Hz, 5.6 kW
Dimensions (LxWxH):
1295mm x 497mm x 593mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

Model FS-302

4167/5000 liters/min (144/177 CFM)
Model FS-302
220~440V, 50/60 Hz, 2.98 kW
Dimensions (LxWxH):
814mm x 380mm x 820mm
Ultimate Pressure:
≤ 1 (7.5x10-3) Pa(Torr)

Model FS/FSE-602

8300/10000 liters/min (500/600 CFM)
Model FS-602
220~440V, 50/60 Hz, 2.98 kW
Dimensions (LxWxH):
814mm x 380mm x 915mm
Model FSE-602
220~380V, 50/60 Hz, 3.73 kW
Dimensions (LxWxH):
1295mm x 497mm x 780mm
Ultimate Pressure:
≤ 1 (7.5x10-4) Pa(Torr)

Model FS/FSE-902

12500/15000 liters/min (750/900 CFM)
Model FS-902
220~440V, 50/60 Hz, 2.98 kW
Dimensions (LxWxH):
895mm x 410mm x 943mm
Model FSE-902
220~380V, 50/60 Hz, 3.73 kW
Dimensions (LxWxH):
1295mm x 497mm x 812mm
Ultimate Pressure:
≤ 1 (7.5x10-4) Pa(Torr)

Model FS/FSE-1302

17500/2100 liters/min (1050/1260 CFM)
Model FS-1302
220~440V, 50/60 Hz, 4.47 kW
Dimensions (LxWxH):
920mm x 430mm x 957mm
Model FSE-1302
220~380V, 50/60 Hz, 5.6 kW
Dimensions (LxWxH):
1295mm x 497mm x 855mm
Ultimate Pressure:
≤ 1 (7.5x10-4) Pa(Torr)

Model FS/FSE-1802

25000/30000 liters/min (1500/1800 CFM)
Model FS-1802
220~440V, 50/60 Hz, 4.47 kW
Dimensions (LxWxH):
920mm x 430mm x 1030
Model FSE-1802
220~380V, 50/60 Hz, 5.6 kW
Dimensions (LxWxH):
1380mm x 497mm x 855mm
Ultimate Pressure:
≤ 1 (7.5x10-4) Pa(Torr)

> Request Pricing & Information


click charts & images to enlarge

FMG-DRY Comparison Chart

FMG-DRY
FS-80
Edwards iL70 Edwards iQDP80 Edwards iH80 Ebara ESR20N Ebara EST25N
Coating Ceramic No No No No No
Greased Bearings No No Yes No Yes Yes
Oil Seal Non-Contact Elastomer Elastomer Elastomer Non-Contact Non-Contact
Shaft Support Double Ended Cantilever Double Ended Cantilever Double Ended Double Ended
Rotor Design Screw Claw Claw Claw Roots Screw
Canned Motor Yes Yes No Yes Yes Yes
Process Applications Light~Harsh Light Light~Medium Light~Harsh Light~Medium Light~Harsh
Units
PERFORMANCE
Pumping Speed L/min 1300/1600 1167/1400 1300/1600 1433/1717 1300-2000 2500
m3/hr 80/96 70/84 80/96 86/103 78-120 150
cfm 47/57 41/50 47/57 51/61 46-71 89
Ultimate Vacuum Torr 7.60E-03 2.28E-02 2.28E-02 7.60E-03 1.52E-02 9.88E-03
mbar 0.01 0.03 0.03 0.01 0.02 0.013
POWER
Motor Rating KW 3 2.2 4 3.5 2.5 5.5
CONNECTION
Inlet NW50 ISO63 ISO63 ISO63 NW40 NW40
Outlet NW40 NW40 NW40 NW40 NW40 NW40
WATER
Flow L/min 3 2 3 2 2 3.5
INSTALLATION
Weight kg 280 230 216 240 90 300
Noise Level dBA ≤68 ≤62 ≤70 ≤64 NA NA
NITROGEN
Dilution Flow L/min 0-60 NA 25-112 40 11-13 11-13
Sealing Flow L/min 3-5 4 7-17 4 NA NA
DIMENSIONS
Length mm 814 781 830 781 695 1140
Width mm 380 390 390 390 280 410
Height mm 663 529 597 529 370 531

FMG Enterprises Inc.
1125 Memorex Drive
Santa Clara, CA 95050

CE SEMI

ph: 800.327.6177 ph: 408.982.0110 fax: 408.982.0529

Email: sales_fmg@fmgvacpump.com
Web Site: http://FMGVacPump.com

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