FMG - The repair and rebuild experts.

Why do you need a process vacuum?

When you work in the semiconductor industry, you frequently need to produce a vacuum created by a process vacuum system. A process vacuum system is essentially a vacuum pump that pulls gas molecules through an intake valve and forces them through an outtake valve, creating a vacuum in the remaining chamber.

Depending on the application, there are several different types of process vacuum systems to choose from, each with its own pros and cons. A few of the most popular are:

  • Dry pumps – these pumps are able to produce a vacuum in a dry environment, with no oil lubrication. This means there is no chance of liquid contamination in the chamber and there are no pollutants released when a vacuum is created.
  • Rotary vane pumps – these pumps feature only one moving part, meaning they are fairly easy to operate and maintain. However, they require oil lubrication which can potentially contaminate the vacuum.
  • Liquid ring pumps – these pumps are lubricated with water, which offers low chances for contamination or pollution, but keeping several vanes perfectly maintained can be a challenge.

Regardless of which process vacuum pump you select for your company’s needs, you are going to want to have on-hand the phone number of highly trained technicians to service your pump should a problem occur. The number you will need is 408-982-0110 and toll free at 1-800-327-6177. That’s where you can reach the experts at FMG. Here we specialize in the repairing and rebuilding of all types of process vacuum systems and blowers.

If you are experiencing a problem, give us a call. We will either send a technician to your facility or we will have your system shipped to our facility in California. Repair times averages 10 working days, which is one of the fastest turnaround times in the industry. For more information about our process vacuum services, contact FMG today.

Call 800-327-6177 or 408-982-0110
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