After years as an industry leader, Stokes Vacuum Inc. was acquired by BOC Edwards in 2001. BOC/Stokes, a vacuum pump manufacturer for the semiconductor industry, made several equipment innovations over the years. One of those innovations was the scroll pump. The scroll pump is an oil-free pump that provides a clean-operating environment without the aid of a lubricant. To work, one stationary scroll sits inside a rotating scroll. That rotation creates several crescent-shaped gas pockets, which are further compressed by the force of the spinning. Finally the gases are expelled through the exhaust valve.

Major benefits of the Stokes scroll vacuum pump were:

• Minimal vibration and noise
• High efficiency, due to the low starting speed and minimal heat generated
• Lightweight and compact
• Virtually no pollutants released in the creations of a vacuum
• No oil contamination
• Easy to maintain

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