Cryogenic vacuum pump

In recent years, the cryogenic vacuum pump has become one of the most widely used vacuum pumps in the semiconductor industry. A cryovac pump operates by cooling internal elements down to cryogenic temperatures. Water vapor and nitrogen are cooled down to around 77 Kelvin, while activated carbon is cooled down to approximately 15 Kelvin and absorbs the other gases. This creates a vacuum.

Cryogenic compressor

Perhaps the biggest advantage to cryogenic compressor pumps, making them quite favorable to workers in the semiconductor industry, is that they are very hardy. They are much less susceptible to breaking down from too much pressure or accidental atmospheric venting. When the cryo pump gets warm, it temporarily stops pumping – instead going into regeneration mode. This is an extremely efficient feature that will save time and money by avoiding repair time and costs.

Cryovac

If you do have problems with your cryovac, call the experts at FMG. We specialize in repairing and rebuilding all types of cryogenic vacuum pumps and compressors for the semiconductor industry. To ensure that you do not lose out on production time, FMG has a complete cryogenic vacuum pump inventory available for purchase.

Let us know how we can assist you with your cryogenic compressor problems by emailing us at fmg_sales@fmgvacpump.com One of our representatives will be getting in contact with you immediately to let you know how we can assist you and to quote you a competitive price. Email us today.